Abstract
The contribution of backscattered electrons to Auger and secondary electron yields was examined by in situ measurements while evaporating Be onto Cu substrate at constant rate of 1.2 Å/min. The ratios βA and βs of Auger (KVV) and secondary yields of Be due to backscattered electrons to those due to primary electrons were experimentally obtained from the Auger and true secondary electron yields versus backscattering coefficient η curves, and were evaluated to be 1.6 and 4.4 at a primary energy of 1.0 keV, respectively. The backscattering factor r for Be (KVV Auger) was experimentally found to be 1.1 at a primary energy of 1.0 keV.
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