Abstract
Auger electron spectroscopy was applied to study depth profiles of PbTiO3 thin films which were prepared by coevaporation with high deposition rate of 50 nm/min and with substrate temperature of 550°C. When the films were deposited on sputtered Pt films, Pb was concentrated on the Pt surface and PbPtxwas formed. On the contrary, a perovskite phase of PbTiO3 was obtained without post thermal annealing on a sputtered 1% Te-added indium tin oxide (S-ITO) substrate. Chemical composition of the film on S-ITO was not dependent on depth excepting surface region.
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