Abstract
Mechanism of charge transport in a diode of a silicon carbide’s Schottky barrier formed by a quasi-amorphous interstitial phase TiBx on the surface of n-6H-SiC (0001) single crystals with an uncompensated donor (nitrogen) concentration of ∼1018 cm−3 and dislocation density of ∼(106–108) cm−2 has been studied. It is demonstrated that, at temperatures T ≲ 400 K, the charge transport is governed by the tunneling current along dislocations intersecting the space charge region. At T > 400 K, the mechanism of charge transport changes to a thermionic mechanism with a barrier height of ∼0.64 eV and ideality factor close to 1.3.
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