Abstract

The surface nano-polishing features and wear regime of textured Silicon carbide (SiC) substrates are studied using molecular dynamics modelling. Surface groove-shaped textures improve nano-polishing performance. This method also reduces subsurface wear damage. Switching from cutting to adhering regime can enhance surface roughness, frictional coefficient, and wear regime by decreasing depth. Specifically, reducing polishing depths improved surface roughness from 1.77% to 9.33%. Increasing polishing speed or crystal direction indicates an adherent wear regime and improves surface roughness from 2.6% to 9.61%. Nano-polishing the (0001) plane produced more heat than other planes. Thus, the (0001) plane has more graphene-like structure atoms and is closer to completion than other planes. This discovery helps texture SiC-based materials increase their anti-friction and wear properties.

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