Extremely enhanced friction and wear performance of hydrogen-free DLC film at elevated temperatures via Si doping

Abstract

Hydrogen-free diamond-like carbon (DLC) films have garnered significant attention as a highly efficient solid lubrication material, but poor high-temperature lubrication and wear resistance limit their further application. Here, silicon-doped DLC (Si-DLC) films with different Si contents were deposited using a superimposed HiPIMS-DCMS deposition system to improve their high-temperature lubrication and wear resistance performance. The influence of Si content on the microstructure, mechanical and high-temperature friction and wear behavior of Si-DLC films was investigated. The results showed that Si-DLC films had a dense structure and nanoscale smooth surface. The Si doping enhanced the adhesion strength and relieved the residual stress of Si-DLC films, but decreased the hardness and Young's modulus. Meanwhile, Raman and XPS spectroscopy revealed significant local structural changes in Si-doped DLC films. Furthermore, the results showed that DLC films doped with low Si content displayed excellent tribological performance at elevated temperatures due to the graphite lubricating layer on the surface of wear marks. Specifically, Si-DLC film with 3.31 at% Si had an ultra-low average friction coefficient of 0.04 at 450 °C and still provided effective lubrication at temperatures up to 500 °C. In contrast, pure DLC film failed to lubricate at 450 °C due to the severe graphitization transition and Si-DLC film with 17.47 at% Si quickly failed to lubricate at 200 °C due to the SiC and SiO2. This work sheds light for the high-temperature application of DLC films doped with low Si content by superimposed HiPIMS-DCMS deposition system.