Abstract
The intensity oscillation of reflection high energy electron diffraction (RHEED) was observed during the pulsed laser deposition of ultra-thin SrTiO 3 films on a-axis oriented YBa 2Cu 3O 7−δ (YBCO) thin films. This enabled us to control digitally the overlayer thickness on an atomic scale. In the same deposition chamber, we could fabricate high quality epitaxial YBCO thin films on SrTiO 3 with Tc exceeding 80K and 90K for a-and c-axis oriented films, respectively. Reducing the particle density below 10 5cm −2 on the bottom YBCO films should be promising to construct Josephson tunnel junctions.
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