Atomic Species Analysis and Three-Dimensional Observation by High-Angle Hollow-Cone Dark-Field Transmission Electron Microscopy

Abstract

Methods of determining atomic species and reconstructing three-dimensional images of the specimen structure were examined by high-angle hollow-cone dark-field transmission electron microscopy (HADF-TEM). The contrast of the HADF image systematically changed depending on the atomic number and the size of particles deposited on carbon films. The relationship between the contrast and the atomic number was well simulated using the theory of multiple electron scattering. The specimens, which were Cu particles precipitated in Si crystal, were observed with an inclination from -50 to 50° by steps of 2°. The images were processed using computed tomography. It became clear that the spatial distribution of the Cu particles differed depending on whether the precipitated position was a dislocation or a (111) stacking fault.