Atomic-Scale Imaging of B/Si(111)√3×√3 Surface by Noncontact Atomic Force Microscopy

Abstract

We observe the B/Si(111)√3×√3 surface by noncontact atomic force microscopy (NC-AFM) with atomic resolution. Two types of spot (dim and bright spots) appear in AFM images. The dim spots correspond to the B-S5 structure where the subsurface atom is the B atom, while the bright spots correspond to the Si-T4 structure where the sub-surface atom is the Si atom. By NC-AFM, we successfully determine the difference between the atom species under the surface, such as Si and B atoms.