Abstract
Successful preparation of perpendicularly magnetized Co thin layers on Pt seed-layers using atomic layer deposition (ALD) technique with Co(PF3)4H as a precursor is reported. The residual phosphorus content in the samples, due to low deposition temperatures to realize ALD, was reduced effectively by tuning ALD parameters. Spin-orbit-torque driven current-induced domain wall motion was observed in the strip containing ALD Co layer prepared with the low phosphorus condition.
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