Abstract

Nickel sulfide (NiS) is grown by atomic layer deposition (ALD) using sequential exposures of bis(2,2,6,6-tetramethylheptane-3,5-dionate)nickel(II) [Ni(thd)2] and hydrogen sulfide (H2S) at 175 °C. Complementary combinations of in situ and ex situ characterization techniques are used to understand the deposition chemistry and the nature of film growth. The saturated growth rate of ca. 0.21 Å per ALD cycle is obtained, which is constant within the ALD temperature window (175–250 °C). As deposited films on glass substrates are found polycrystalline without any preferred orientation. Electrical transport measurement reveals degenerative/semimetallic characteristics with a carrier concentration of ca. 9 × 1022 cm−3 at room temperature. The ALD grown NiS thin film demonstrates high catalytic activity for the reduction of I−/I3− electrolyte that opens its usage as cost-effective counter electrode in dye sensitized solar cells, replacing Pt.

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