Abstract
A discrepancy occurred between two measured results in the literature concerning the peak position of the sp 3 content of deposited—mainly sp 2 bonding—carbon layers. The peak position was found at about 40 eV projectile energy in the case of MSIB, while at about 90 eV in MWCVD and RFCVD deposition. A Monte Carlo simulation is used to demonstrate a possible reason for the difference. It can be understood via simulation that the masses of the bombarding species are responsible for the different density peak positions. In the first experimental case carbon atoms, in the second cases methyl radicals were used in the nucleation technique.
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