Atom vacancy lines and surface patterning: The role of stress for Br-Si(100)-(2×1)at 700 K

Abstract

Using variable-temperature scanning tunneling microscopy, we studied Br-induced roughening of Si(100)-$(2\ifmmode\times\else\texttimes\fi{}1)$ at 700 K. The roughening pathway requires Br-free dimers so that a saturated surface is inactive. Initial roughening involves the formation of atom vacancy lines and regrowth chains of Si dimers on the terraces. The atom vacancy lines grow longer through a stress-induced process that creates dimer vacancies. Br adatom repulsion then splits these dimer vacancies into pairs of single-atom vacancies. A $(3\ifmmode\times\else\texttimes\fi{}2)$ reconstruction derived from dimer rows and atom vacancy lines is energetically favored at high concentration due to Br-Br repulsive interactions and Br bond angle relaxation that is facilitated by the $(3\ifmmode\times\else\texttimes\fi{}2)$ structure. Though favored, the conversion is slow at high coverage. Continuous scanning over $\ensuremath{\sim}72$ h shows the correlation between Br concentration and surface morphology. Ultimately, a highly dynamic configuration is reached in which large regrowth islands and large terrace areas have $(3\ifmmode\times\else\texttimes\fi{}2)$ symmetry. These areas become unstable when the Br concentration drops below a critical value and conversion to $(2\ifmmode\times\else\texttimes\fi{}1)$ terraces and extended islands occurs.