Abstract
Atom probe microscopy, which is based on the first ever atomic-scale imaging technique, field ion microscopy (FIM), has entered a new era in its development. Three-dimensional atom probes (3DAP) are now operating which produce 3D images with atomic scale resolution. It appears that the technology will soon be at hand to make 3DAPs do everything that their predecessor, the conventional atom probe, now does and also reach the third dimension. These microscopes will be simpler, smaller, faster, and much more powerful than the conventional atom probe. Several developments are responsible for this suggestion. 1) Rapid pulsing schemes are being developed which will make it possible to achieve on the order of 106 pulses per second. 2) Highspeed position-sensitive detectors (PSDs) have been designed which can detect several ions in a givenpulse with very high precision. 3) New specimen geometries will soon become possible which will revolutionize the atom probe. Let us consider the ramifications of each of these developments in turn.
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