Abstract
Recent progress in atom probe field ion microscopy (APFIM) and its applications to nanoscale microstructural studies of metallic materials are reviewed. By employing a three dimensional atom probe (3DAP), it is possible to map out elemental distributions in the real space with almost an atomic resolution, and chemical analysis of interfaces and nanoparticles can be made with improved accuracy in comparison with the conventional atom probe. Unique features of atom probe field ion microscopy are demonstrated by showing recent examples of APFIM and 3DAP applications to nanoscale characterizations of aluminum alloys, nanocrystalline magnetic materials and steels.
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