Abstract
ABSTRACTOptical thin films with SiO2-TiO2 stack were prepared by the technology of electron beam (e-beam) evaporation with ion beam assistant deposition (IBAD). The mechanical (stress) and optical properties of as-deposited thin films were studied as a function of exposure time in the atmospheric environment. Exposing to the air at the ambient temperature causes incremental compressive stress and spectrum profile changes, which is related to the absorption of water moisture into the films. Making a dense film is, therefore, a practical approach to improve structural stability of thin films and then the performance of optical devices.
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