Abstract
In this study, we have proposed the double grounded atmospheric pressure plasma jet (2G-APPJ) device to individually control the plasmas in both fragmentation (or active) and recombination (or passive) regions with a mixture of He and Ar gases to deposit organic thin films on glass or Si substrates. Plasma polymerization of acetone has been successfully deposited using a highly energetic and high-density 2G-APPJ and confirmed by scanning electron microscopy (SEM). Plasma composition was measured by optical emission spectroscopy (OES). In addition to a large number of Ar and He spectra lines, we observed some spectra of C2 and CH species for fragmentation and N2 (second positive band) species for recombination. The experimental results confirm that the Ar gas is identified as a key factor for facilitating fragmentation of acetone, whereas the He gas helps the plume of plasma reach the substrate on the 2nd grounded electrode during the plasma polymerization process. The high quality plasma polymerized thin films and nanoparticles can be obtained by the proposed 2G-APPJ device using dual gases.
Highlights
Polymer thin films can be prepared by various techniques such as a chemical synthesis, electrochemical polymerization, and plasma enhanced chemical vapor deposition (PECVD)
We have proposed the double grounded atmospheric pressure plasma jet (2G-APPJ) device to individually control the plasmas in both fragmentation and recombination regions with a mixture of He and Ar gases to deposit organic thin films on glass or Si substrates
In the fragmentation region where the high voltage of 10 kV was applied between the H.V. electrode and the 1st grounded electrodes, the acetone monomer was mixed with gases from both tubes and the discharge was initiated near the HV electrode, which was on the downstream tube
Summary
We have proposed the double grounded atmospheric pressure plasma jet (2GAPPJ) device to individually control the plasmas in both fragmentation and recombination regions. Unlike the conventional APP jet with only one grounded electrode, the newly proposed 2G-APPJ device having the auxiliary grounded electrode, twined around the side tube, can separately control the fragmentation and recombination regions in combination with gas-flow configuration, which results in generating the plasma with high plasma particle energy in both regions. By employing the dual gas mixture of Ar and He, the proposed 2G-APPJ enables the Ar plasma to facilitate the fragmentation of the acetone monomer within the tube, and simultaneously enables He to enhance the propagation of plasma plume toward the substrate on the 2nd grounded electrode.[10,11] plasma polymerization of acetone monomer has been successfully deposited using a novel atmospheric pressure plasma jet, featuring the double grounded electrodes with dual gases at a sinusoidal wave with low frequency. The experimental results confirm that the discharge intensities in both fragmentation and recombination regions can be significantly improved thanks to the use of the two grounded electrodes, and the high quality plasma polymerized thin films and nanoparticles can be obtained
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