Abstract
Asymmetry in indentation-induced mechanical damage on Si (111) surfaces is investigated by using optical microscopy and X-ray diffraction topography. Cracks, residual strain fields and anneal-induced dislocation rosettes around the indentation are found to represent the asymmetries in the [1̄1̄2] and reverse [112̄] directions on the (111) surface. The crack formation along three <112> directions and the residual strain field distribution along <112> directions are discussed in terms of dislocation reaction and silicon crystal structure, respectively.
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