Abstract
Scratch-induced mechanical damage on silicon (111) surfaces, in particular the fractures, residual strain fields and anneal-induced dislocations generated by <112> and <110> direction scratches, is investigated by optical microscopy, X-ray diffraction topography and the copper decoration method. The asymmetry in this damage in the [112̄] and reverse [1̄1̄2] directions is observed. The asymmetries are correlated with each other and are discussed in terms of the inclined (111̄) cleavage plane whose intersection with the (111) surface is perpendicular to the <112> direction.
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