Abstract
We propose an astigmatism correction method for the subaperture stitching Hindle test to measure hyperbolic convex aspheres. Astigmatic wavefront errors arise from misaligned Hindle setups, mechanical runout errors of the rotational motion for stitching, and the surface error of the target itself. Because these errors are combined, they cannot be separated in the conventional subaperture stitching Hindle tests. We exploited the rotational periodicity of each error to distinguish the surface figure error from other astigmatic error sources and rectified the Hindle test results with a third-order astigmatism. Using the subaperture stitching Hindle test, we averaged two sets of measurement data with a 180° rotational phase difference between them to calculate the astigmatic surface error. The proposed method was verified experimentally by comparing it with the results from a commercial stitching interferometer from QED Technologies; only subnanometer differences in the root-mean-square values were obtained. Therefore, the proposed method calibrated the system errors from the test surface wedge and the rotational decenter easily, thereby reducing the mechanical costs and alignment efforts and making it more accessible than a sophisticated mechanism.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call