Abstract

AbstractThe aim of this contribution is to assess the ferroelectric and piezoelectric properties of Barium Zirconate Titanate- Barium Calcium Titanate (BZT-BCT) sol-gel thin films. 400 nm-thick films with a randomly oriented perovskitic crystal structure have been grown on platinum coated silicon wafer by means of repeated deposition by spin coating and subsequent heat treatments (350 ℃ and 750 ℃). Hence, Pt top electrode have been sputtered through shadow mask. The main results are here summarized: Maximum Polarization (Pmax) value equal to 41.3 μC/cm2 obtained in a PE curve (@15 V and 1 kHz) and a calculated value of relative dielectric constant equal to 582 has been estimated from the CV curves (@ 10 V and 1 kHz). Trough displacement measurements it has been possible to estimate an e31,f, (transversal piezoelectric coefficient) equal to 7.99 C/m2 by applying a sine signal at 12.375 kHz (the first vibration mode) and a maximum amplitude of 20 V.KeywordsBZT-BCTLead-freeSol-gelThin filmsPiezo MEMS

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