Abstract
Chemo-resistive hydrogen-gas sensors based on thermally reduced graphene oxide (rGO) have been fabricated on a micro-hotplate by positive ac dielectrophoresis (DEP). The optimized DEP parameters for manipulating rGO nanostructures into Au electrodes for hydrogen sensing are: applied frequency = 1 MHz, peak-to-peak voltage = 5 V, and DEP time = 30 s. The device exhibits good sensitivity (∼6%) with fast response time (∼11 s) and recovery time (∼36 s) for 200 ppm hydrogen gas at room temperature. This result indicates that the DEP process has great potential for assembling rGO for hydrogen-gas sensor in many industrial and scientific applications.
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