Abstract
The purpose of this paper is to demonstrate the possibilities for structuring unfired low temperature co-fired ceramic (LTCC) in order to obtain complex 3D-micro structures using specially designed and developed tools for embossing process. The focus will be on the fabrication of different structures with potential use in MOEMS or Bio-MEMS applications. Motivation for selection of LTCC for these applications in addition to fabrication of the structures will be explained in details. Preliminary investigation and optical inspection by means of the surface quality is performed at scanning electron microscope and non-contact optical profilometer. Based on obtained results, first improvements are introduced.
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