Abstract
Depth profiles of a Ni/Ag multilayer with 25 nm nominal layer thickness obtained by Time-of-Flight Secondary Mass Spectrometry (ToF-SIMS) show the usual rounded top shape of the Ni layers, but a strange profile of Ag with two peaks of different intensities. Application of the Mixing-Roughness-Information depth (MRI)-model for quantification of both depth profiles revealed the fact that the only way to explain the measured Ag profile was the assumption of interfacial oxygen that promotes a strong matrix effect on the Ag ion intensity. Furthermore, it was demonstrated that the often applied normalizing of the elemental ions by the sum of the two ion intensities removes the double peak structure but results in a wrong quantification.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
