Abstract
Ordered arrays of Er-doped Si nanodots were fabricated by pulsed laser deposition using an anodic aluminum oxide (AAO) nanopore membrane. Er-doped Si (Si:Er) nanodots with an average diameter of 60–80nm and a periodicity of 100nm were uniformly assembled into hexagonally ordered nanopores of AAO membrane. Photoluminescence (PL) spectra taken from Si:Er nanodots showed an emission peak at 1.54μm, which is due to intra-4f shell transition (I13∕24→I15∕24) of Er3+ ions. Postannealing of nanodot arrays up to 500°C resulted in the enhancement of PL intensities without enlargement or aggregation of the nanodots.
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