Abstract
Area-Selective Atomic Layer Deposition of Ruthenium via Reduction of Interfacial Oxidation
Published Version
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https://doi.org/10.1021/acs.chemmater.4c01133
Journal: Chemistry of Materials | Publication Date: Sep 13, 2024 |
Area-Selective Atomic Layer Deposition of Ruthenium via Reduction of Interfacial Oxidation
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