Abstract
Arc sources of metallic plasma are effective facilities for depositing coatings in vacuum and for high speed vacuum pumping. Coatings are formed by condensation in the metallic plasma, generated by the vacuum arc, burning in cathode material vapours. The choice of cathode material and residual atmosphere composition determines the chemical structure of the deposited coatings. Shown are two modifications of the arc sources notable for their purpose, design and magnetic control method.
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