Abstract

Ion-beam mixing in Al-Pd, Al-Cr, Pd-Cu, Ag-Cu and Ag-Fe bilayers has been studied using Rutherford backscattering spectroscopy (RBS) and Auger electron spectroscopy (AES) over an ion dose range between 1 × 1015 and 1 × 1016 Ar+ cm−2 at room temperature. RBS and AES results show that the mixing efficiency of the light elements is higher than that of the heavy elements. The mixing efficiency of a heavy element is independent of the heat of mixing energy, while that of a light element has a close relation with the heat of mixing. The experimental results are discussed in terms of cascade mixing and thermal spike mixing.

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