Dopant Site Location in Dual-Implanted Gap using {111} Planar Channeling

Abstract

ABSTRACTPrevious studies have indicated that dual implantation can efficiently introduce group IV dopant onto selected sub-lattice sites in m-V compound semiconductors, thus enhancing electrical activation. We studied this phenomenon in GaP using Rutherford Backscattering Spectroscopy (RBS) to determine the lattice location of Sn atoms. We used single crystals of GaP (100) which had been implanted at 400° C with120 Sn+ following previously implanted69 Ga+ or 31P+. Energies were selected for euivalent projected ranges, and all species were implanted with doses of 1 × 1015 atoms/cm2 . Asymmetry in the angular scan of the {111} planar channel was then used to determine the sub-lattice location of the implanted Sn. RBS results indicated that for all implants Sn atoms were substituting Ga and P sites eually. However, Hall effect measurements gave p type conduction for GaP implanted with Sn alone, while those with prior implants of Ga or P resulted in n-type conduction. RBS and Hall effect results are explained by a vacancy complex model.