Approaches to analyzing insulators with Auger electron spectroscopy: Update and overview

Abstract

This paper provides an updated overview, intended to be of practical value to analysts, of methods that can be applied to minimize or control the build-up of near-surface electrical charge during electron-induced Auger electron spectroscopy (AES). Although well-developed methods can be highly effective, dealing with insulating or ungrounded samples for which high spatial resolution is needed remains a challenge. Examples of the application of methods involving low-energy ion sources and sample thinning using a focused ion beam that can allow high-resolution measurements on a variety of samples are highlighted. The physical bases of newer and traditional methods are simply described along with strengths and limitations of the methods. Summary tables indicate methods that can be applied to most AES spectrometers, methods that require special instrumental capabilities and methods that require special sample preparation or mounting.