Abstract
The formation of a finely-focussed probe in the scanning transmission electron microscopy (STEM) allows the characterization of thin metal samples on a nanometer scale. Apart from imaging capability the STEM provides information about crystal structure by means of microdiffraction. Such structural information about various phases present is complemented by microspectroscopy involving both electron energy loss spectroscopy (EELS) and energy dispersive X-ray analysis (EDX). EELS is especially useful for characterizing low Z elements, where EDX is least sensitive, and may be successfully applied to alloys containing carbon or nitrogen. Detection limits for EELS are estimated to be as low as 10 atoms assuming a field emission source is used. EELS data also contain more detailed information about chemical bonding in the core edge fine structure. In materials characterization on a microscopic scale there is a need to combine several techniques within the STEM.
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