Abstract
Capabilities of low-energy electron-induced X-ray spectroscopy (LEEIXS) for providing detailed qualitative and quantitative information about the first 10 to 1000 Å of a solid surface are described. Trace detection of low Z elements such as B and F in thin films formed on titanium substrates is illustrated. These impurities are incorporated from the electrolytes (H 3BO 3 and H 2SiF 6 solutions respectively) during anodization. The characterization of thin films formed on titanium by chemical conversion in phosphate/fluoride solution is also reported. Chemical bonding information is obtained from the fine structure of the Ti L 2,3 X-ray emission bands. Results prove unambiguously that the main component of the conversion films is not a TiO 2 oxide but rather a TiF 4-like fluoride. In addition LEEIXS has been used for obtaining O and P elemental depth profiles through an anodic film grown on niobium in phosphoric baths. Such an investigation was performed in conjunction with an external step by step chemical etching of the specimen surface. Lastly, the application of LEEIXS to the surface characterization of stainless steels prior and after a passivation treatment is described.
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