Abstract
Simultaneous ion backscattering and ion-induced X-ray emission ( E x ⪰ 300 eV ) analyses have been performed using helium ions as probes of the first few hundred nanometers of various materials. These studies serve as a demonstration of the complementary nature of the two types of information obtained. Uncertainties associated with each of the individual techniques were reduced by performing both analyses. The pricipal advantages of simultaneous analyses over sequential analyses have been delineated.
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