Abstract

Ion implantation set-up on the base of ion gun with target sputtering by Penning discharge plasma was created. The set-up allows to conduct implantation of ions of various materials with an implantation current of 100 μA/cm 2 at acceleration voltage of up to 30 kV. Combined implantation of TiB 2 compound and Argon or Nitrogen were applied for surface properties modification of WC–Co hard alloy and SKD11 steel. The effect of implantation on mechanical and tribological properties has been studied and discussed with respect to implantation fluence. It was shown that the main effect of implantation is the modification of thin surface layer with formation of Ti, B, N 2 — base compounds, which leads to modification of surface adhesion interaction and wear resistance improvement. Examples of application to real products are presented.

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