Abstract
Electro-thermal (E-T) actuators have been developed to complement the capabilities of electrostatic actuators. The thermal actuators presented here can be arrayed to generate high forces. Equally significant is that the single actuators and arrays of actuators operate at voltages and currents that are directly compatible with standard microelectronics. This paper demonstrates how combinations of two or more electro-thermal actuators can be applied to a variety of basic building-block micromechanical devices: array of ten lateral actuators; array of ten vertical actuators; vertically actuated two-axis tilting mirror; corner-cube retroreflector actuated by lateral array; grippers over the die edge with flip-over wiring; rotary stepper motor; flip-up optical grating on rotary stepper motor; linear stepper motor; and a linear stepper motor for assembly of hinged structures.
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