Abstract

AbstractThe application of the Tougaard algorthm for the calculation of the inelastic background of surface electron spectra to the investigation of titanium and cobalt silicides is disecussed. The differential inelastic scattering cross‐section is calculated based on optical or energy loss experiments, derived from REELS spectra or approximated by the ‘Universal cross‐section’. The signal‐to‐noise ratio, the sensitivity for small peaks and sensitivity factors are discussed.

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