Abstract
The application of sputtering is interesting for the investigation of shape memory alloys. Alloy films with a wide composition range can be obtained using a multi-target sputtering apparatus. Furthermore, the sample preparation is easy; samples can be cut out of the film with scissors or a wire saw and electropolishing only takes 10 s. Using thin films, the effects of nanostructures on shape memory behaviour, thickness effect, deformation mechanism of martensite, and functionality of composite materials were investigated. On the basis of these results, the feasibility of the sputtering method as a tool for analysis and development was discussed.
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