Abstract
The high energy density of a magnetic field in the presence of ferromagnetic or permanently magnetized materials offers the potential for conversion of the magnetic field energy into forces or torques useful for microactuator applications. Layers of high permeability materials with a thickness of several hundred microns are to be shaped with high precision in order to fabricate microactuators based on magnetic principles. These requirements are easily met by LIGA technique, which allows the formation of 3D structures with a high aspect ratio by selecting, e.g., nickel-cobalt-iron alloys in the electroforming process. A linear step motor is introduced based on the reluctance principle. Emphasis is put on the evaluation of the equipment and technical aspects of the manufacturing process utilizing the LIGA technique.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
