Application of the holographic interferometer for modeling of processes in a vapor phase epitaxy reactor

Abstract

Using holographic interferometry techniques, it is possible to visualize flows in the gas phase and obtain quantitative data about vapor phase density distribution in a given volume. The possibility of using this approach for monitoring processes in a vapor phase epitaxy (VPE) reactor has been studied using an experimental setup comprising a reactor chamber with two transparent windows, a real-time holographic interferometer, a gas supply system, and a system for visual observation of the gas flows. The results show good prospects of this method for optimization of the reactor design and the VPE process parameters.