Abstract
ABSTRACTA new application of selective area metalorganic vapour phase epitaxy is demonstrated: fabrication of distributed feedback (DFB) gratings with sub-micron period and modulated coupling coefficient Kc. A SiO2 mask layer defines the InGaAs(P) grating pattern as well as the lateral variation in growth rate and, hence, thickness of the grating. In this way K can be varied along the laser cavity in a controlled and reproducible manner.
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