Abstract
X-ray microanalysis by analytical electron microscopy (AEM) has proven to be a powerful tool for characterizing the spatial distribution of solute elements in materials. True compositional variations over spatial scales smaller than the actual resolution for microanalysis can be determined if the measured composition profile is deconvoluted. Explicit deconvolutions of such data, via conventional techniques such as Fourier transforms, are not possible due to statistical noise in AEM microanalytical data. Hence, the method of choice is to accomplish the deconvolution via iterative convolutions. In this method, a function describing the assumed true composition profile, calculated by physically permissible thermodynamic and kinetic modeling, is convoluted with the x-ray generation function and the result compared to the measured composition profile. If the measured and calculated profiles agree within experimental error, it is assumed that the true compositional profile has been determined. If the measured and calculated composition profiles are in disagreement, the assumptions in the physical model are adjusted and the convolution process repeated.
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