Abstract

MEMS sensor is a new type of sensor manufactured by micro electronics and micro machining technology. Compared with traditional sensors, it has the characteristics of small size, light weight, low cost, low power consumption, high reliability, suitable for batch production, easy integration and intelligent realization. This project adopts a multi in one sensor based on MEMS principle. The sensor is a wireless passive three-axis sensor that integrates acceleration, speed, displacement, temperature, inclination and other parameters. It is very convenient to install and disassemble, and can realize the cycle monitoring of the whole wind field.

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