Abstract

Focused ion beam (FIB) techniques have played an important role in nanoscience over the past ~10 years, providing a versatile method of manipulating matter on the nanoscale. During this time, FIB techniques have been used to modify and enhance probes for atomic force microscopy (AFM) techniques, enabling a variety of ingenious and exciting AFM applications with specialized probes. This chapter highlights novel applications of FIB processing, where ion beam milling has been used to quantitatively and accurately determine the mechanical properties of atomic force microscope cantilevers. Several other novel contributions of FIB methods towards the field of AFM are also reviewed.

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