Abstract
We report on the use of real-time ellipsometric monitoring in the fabrication of a very demanding multi-layer optical thin film coating for a colour-corrected, near-infra-red (NIR) blocking filter with a 532 nm notch for a laser protection application. The design consists of 79 layers of Ta 2O 5 and SiO 2 of various thicknesses and is extremely sensitive to errors in thickness and deviations of optical properties of the constituent films. The films were deposited by ion-assisted deposition (IAD).
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