Abstract
A method is described whereby substrate optical constants, film refractive index and film thickness are simultaneously obtained from one set of ellipsometric measurements at various wavelengths of light performed on a film-covered metal surface. In this method the metal substrate's optical constants are represented by one of three functional forms: a modified free electron function, a free electron plus classical oscillator, and a sum of classical oscillators. Values of metal optical constants, film refractive index and film thickness so obtained agree well with independent determinations of these quantities.
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Schedule a callMore From: Journal of the Chemical Society, Faraday Transactions 2
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