Abstract
Using the field emission effect of a carbon nanotube (CNT), we characterized a new type of technology for detecting low pressure. The fabricated low pressure sensor is of a triode type, consisting of a cathode (carbon nanotubes field emitter arrays), a grid, and a collector. The gauge described here has a triode configuration similar to that of a conventional hot cathode ionization gauge but also has a cold emission source. Due to the excellent field emission characteristics of CNT, it is possible to make a cost effective cold cathode type ionization gauge. For an effective CNT cathode, we used the screen-printing method and also, we controlled the collector and the grid potentials in order to obtain a high ionization current. We found that the ratio of the ionization current to the CNT cathode current changes according to the pressure in the chamber. In short, we elaborate the various metrological characteristics of a home-made pressure sensor that uses CNTs.
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