Abstract
The technique of optical emission spectroscopy (OES) in combination with plasma emission models for determining the parameters of a gas discharge is presented. Measurements of charge carrier concentration and electron temperature in an inductively coupled RF plasma of argon are carried out under low pressure. The concentration and temperature of electrons were determined by selecting the ratio of the intensities of the spectral lines calculated with the collision-radiative model (CRM) to the intensities of the lines obtained in the experiment. The model describes the kinetics of the first 30 excited states of argon and takes into account the following processes: direct electron impact excitation / relaxation, spontaneous emission, radiation trapping, electron impact ionization and charge loss due to diffusion on the walls. The obtained OES results were compared with the results of Langmuir probe measurements of plasma parameters.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
