Abstract
Optical investigation of movable microsystem components using time-averaged holography is investigated in this paper. It is shown that even a harmonic excitation of a non-linear microsystem may result in an unpredictable chaotic motion. Analytical results between parameters of the chaotic oscillations and the formation of time-averaged fringes provide a deeper insight into computational and experimental interpretation of time-averaged MEMS holograms.
Highlights
Interferometry is a powerful experimental technique for the analysis of profiles of surfaces, detection of deflections, motion and structural vibrations of microsystems, where the amplitudes of those vibrations are in the range of nanometers to a few micrometers [1,2,3,4]
Digital holography is used for nondestructive testing, strain analysis and analysis of vibrations [8] in microsystems
Digital holography and speckle interferometry are widely used for the quality inspection and the assessment of reliability of microsystems
Summary
Interferometry is a powerful experimental technique for the analysis of profiles of surfaces, detection of deflections, motion and structural vibrations of microsystems, where the amplitudes of those vibrations are in the range of nanometers to a few micrometers [1,2,3,4]. Digital holography and speckle interferometry are widely used for the quality inspection and the assessment of reliability of microsystems These optical techniques are employed for the measurement of displacements, deformations induced by mechanical, thermal, or electrostatic loads [10,11]. Time average holography is an experimental method for the quantitative registration of surface oscillations, which has been widely applied to the investigation of microsystems. The application of this method has been employed in dynamic micro-metrology [12], dynamic characterization of MEMS diaphragm [13], measurement of static and vibrating microsystems [14].
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