Abstract

The working chamber is evacuated by ro ta ry and diffusion pumps (1 and 2, respec t ive ly) linked by connecting tubes 3, 4, and 8. To prevent oil vapors f rom the diffusion pump getting to the working chamber and to inc rease the degree of vacuum, wate r and liquid ni trogen traps (6 and 7, respect ive ly) a re included in the vacuum sys tem. Rough vacuum is produced by the ro ta ry pump which pumps out a i r f rom the working chamber through tube 8 with the vacuum valve 5 open. When the p r e s s u r e has been reduced to 1 9 10-1-1 9 10 -3 mm Hg, valve 5 is shut and valve 9 opened. The degree of vacuum is measu red with an ionization gage 42.

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