Antimony Aperture Properties on Super-Resolution Near-Field Structure using Different Protection Layers

Abstract

Modifying a rewritable digital versatile disc (DVD) structure by Sb and SiN thin films, near-field super-resolution was performed beyond the optical diffraction limit only using a current DVD optical pickup. Using the wavelength (λ) of 635 nm and the lens numerical aperture (NA) of 0.6, a mark size of 60 nm was recorded and detected at the double rotation speed of Compact Disc. The super-resolution properties of Sb thin films sandwiched by different dielectric layers of SiO2 and ZnS–SiO2 instead of SiN were also investigated. Super-resolution did not occur and the resolution was close to 200 nm, when using the ZnS–SiO2 layers.