Abstract
Cerium oxide (CeO2) films are suitable for use as anti-reflective coatings for display panels, touch screens, and silicon solar cells. The CeO2 films grown by using a reactive radio frequency sputtering method under various deposition conditions was investigated. The CeO2 films were deposited at room temperature because the plastic substrate was too weak for use at higher temperatures. The films exhibited a strong (111) preferred orientation with properties varying as a function of the process conditions. We present the properties of CeO2 anti-reflective coatings on plastic substrates.
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